3/8/2011	7:40:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	7:40:27 AM	Recipe started at 7:40 AM
3/8/2011	7:40:27 AM	H2 valve closed
3/8/2011	7:40:27 AM	BCl3 valve closed
3/8/2011	7:40:27 AM	PH3 valve closed
3/8/2011	7:40:27 AM	SiCl4 pre valve closed
3/8/2011	7:40:27 AM	SiCl4 post valve closed
3/8/2011	7:40:27 AM	Main Vac valve closed
3/8/2011	7:40:27 AM	Bypass valve closed
3/8/2011	7:40:27 AM	Bubbler valve closed
3/8/2011	7:40:27 AM	Helium valve opened
3/8/2011	7:40:27 AM	Helium MFC set to  500.000000
3/8/2011	7:40:27 AM	H2 MFC set to  0.000000
3/8/2011	7:40:27 AM	BCl3 MFC set to  0.000000
3/8/2011	7:40:27 AM	PHl3 MFC set to  0.000000
3/8/2011	7:40:27 AM	SiCl4 MFC set to  0.000000
3/8/2011	7:40:27 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	7:40:27 AM	Tube furnace set to 0
3/8/2011	7:41:15 AM	Run aborted at 7:41 AM
3/8/2011	7:41:15 AM	Helium valve closed
3/8/2011	7:41:15 AM	H2 valve closed
3/8/2011	7:41:15 AM	BCl3 valve closed
3/8/2011	7:41:15 AM	PH3 valve closed
3/8/2011	7:41:15 AM	SiCl4 pre valve closed
3/8/2011	7:41:15 AM	SiCl4 post valve closed
3/8/2011	7:41:15 AM	Bypass valve closed
3/8/2011	7:41:15 AM	Main Vac valve closed
3/8/2011	7:41:15 AM	Bubbler valve closed
3/8/2011	7:41:15 AM	Helium MFC set to  0.000000
3/8/2011	7:41:15 AM	H2 MFC set to  0.000000
3/8/2011	7:41:15 AM	BCl3 MFC set to  0.000000
3/8/2011	7:41:15 AM	PHl3 MFC set to  0.000000
3/8/2011	7:41:15 AM	SiCl4 MFC set to  0.000000
3/8/2011	7:41:15 AM	Tube furnace set to 0
3/8/2011	7:41:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	7:41:17 AM	Helium valve opened
3/8/2011	7:41:19 AM	Helium valve closed
3/8/2011	7:49:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	7:49:30 AM	Recipe started at 7:49 AM
3/8/2011	7:49:30 AM	H2 valve closed
3/8/2011	7:49:30 AM	BCl3 valve closed
3/8/2011	7:49:30 AM	PH3 valve closed
3/8/2011	7:49:30 AM	SiCl4 pre valve closed
3/8/2011	7:49:30 AM	SiCl4 post valve closed
3/8/2011	7:49:30 AM	Main Vac valve closed
3/8/2011	7:49:30 AM	Bypass valve closed
3/8/2011	7:49:30 AM	Bubbler valve closed
3/8/2011	7:49:30 AM	Helium valve opened
3/8/2011	7:49:30 AM	Helium MFC set to  500.000000
3/8/2011	7:49:30 AM	H2 MFC set to  0.000000
3/8/2011	7:49:30 AM	BCl3 MFC set to  0.000000
3/8/2011	7:49:30 AM	PHl3 MFC set to  0.000000
3/8/2011	7:49:30 AM	SiCl4 MFC set to  0.000000
3/8/2011	7:49:30 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	7:49:30 AM	Tube furnace set to 0
3/8/2011	7:50:49 AM	Helium valve closed
3/8/2011	7:50:49 AM	H2 valve closed
3/8/2011	7:50:49 AM	BCl3 valve closed
3/8/2011	7:50:49 AM	PH3 valve closed
3/8/2011	7:50:49 AM	SiCl4 pre valve closed
3/8/2011	7:50:49 AM	SiCl4 post valve closed
3/8/2011	7:50:49 AM	Main Vac valve closed
3/8/2011	7:50:49 AM	Bypass valve closed
3/8/2011	7:50:49 AM	Bubbler valve closed
3/8/2011	7:50:49 AM	Helium MFC set to  0.000000
3/8/2011	7:50:49 AM	H2 MFC set to  0.000000
3/8/2011	7:50:49 AM	BCl3 MFC set to  0.000000
3/8/2011	7:50:49 AM	PHl3 MFC set to  0.000000
3/8/2011	7:50:49 AM	SiCl4 MFC set to  0.000000
3/8/2011	7:50:49 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	7:50:49 AM	Tube furnace set to 0
3/8/2011	7:50:49 AM	Run finished at 7:50 AM
3/8/2011	7:50:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	7:56:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	7:56:35 AM	Recipe started at 7:56 AM
3/8/2011	7:56:35 AM	Helium valve closed
3/8/2011	7:56:35 AM	H2 valve closed
3/8/2011	7:56:35 AM	BCl3 valve closed
3/8/2011	7:56:35 AM	PH3 valve closed
3/8/2011	7:56:35 AM	SiCl4 pre valve closed
3/8/2011	7:56:35 AM	SiCl4 post valve closed
3/8/2011	7:56:35 AM	Main Vac valve closed
3/8/2011	7:56:35 AM	Bubbler valve closed
3/8/2011	7:56:35 AM	Bypass valve opened
3/8/2011	7:56:35 AM	Helium MFC set to  0.000000
3/8/2011	7:56:35 AM	H2 MFC set to  0.000000
3/8/2011	7:56:35 AM	BCl3 MFC set to  0.000000
3/8/2011	7:56:35 AM	PHl3 MFC set to  0.000000
3/8/2011	7:56:35 AM	SiCl4 MFC set to  0.000000
3/8/2011	7:56:35 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	7:56:35 AM	Tube furnace set to 0
3/8/2011	7:57:06 AM	Helium valve closed
3/8/2011	7:57:06 AM	H2 valve closed
3/8/2011	7:57:06 AM	BCl3 valve closed
3/8/2011	7:57:06 AM	PH3 valve closed
3/8/2011	7:57:06 AM	SiCl4 pre valve closed
3/8/2011	7:57:06 AM	SiCl4 post valve closed
3/8/2011	7:57:06 AM	Bubbler valve closed
3/8/2011	7:57:06 AM	Main Vac valve opened
3/8/2011	7:57:06 AM	Bypass valve opened
3/8/2011	7:57:06 AM	Helium MFC set to  0.000000
3/8/2011	7:57:06 AM	H2 MFC set to  0.000000
3/8/2011	7:57:06 AM	BCl3 MFC set to  0.000000
3/8/2011	7:57:06 AM	PHl3 MFC set to  0.000000
3/8/2011	7:57:06 AM	SiCl4 MFC set to  0.000000
3/8/2011	7:57:06 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	7:57:07 AM	Tube furnace set to 0
3/8/2011	7:57:07 AM	Run finished at 7:57 AM
3/8/2011	7:57:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	7:59:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/8/2011	7:59:42 AM	Recipe started at 7:59 AM
3/8/2011	7:59:42 AM	Helium valve closed
3/8/2011	7:59:42 AM	H2 valve closed
3/8/2011	7:59:42 AM	BCl3 valve closed
3/8/2011	7:59:42 AM	PH3 valve closed
3/8/2011	7:59:42 AM	SiCl4 pre valve closed
3/8/2011	7:59:42 AM	SiCl4 post valve closed
3/8/2011	7:59:42 AM	Main Vac valve closed
3/8/2011	7:59:42 AM	Bypass valve closed
3/8/2011	7:59:42 AM	Bubbler valve closed
3/8/2011	7:59:42 AM	Helium MFC set to  0.000000
3/8/2011	7:59:42 AM	H2 MFC set to  0.000000
3/8/2011	7:59:42 AM	BCl3 MFC set to  0.000000
3/8/2011	7:59:42 AM	PHl3 MFC set to  0.000000
3/8/2011	7:59:42 AM	SiCl4 MFC set to  0.000000
3/8/2011	7:59:42 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	7:59:42 AM	Tube furnace set to 0
3/8/2011	7:59:42 AM	Run finished at 7:59 AM
3/8/2011	7:59:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/8/2011	7:59:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/8/2011	8:00:01 AM	Recipe started at 7:59 AM
3/8/2011	8:00:01 AM	Helium valve closed
3/8/2011	8:00:01 AM	H2 valve closed
3/8/2011	8:00:01 AM	BCl3 valve closed
3/8/2011	8:00:01 AM	PH3 valve closed
3/8/2011	8:00:01 AM	SiCl4 pre valve closed
3/8/2011	8:00:01 AM	SiCl4 post valve closed
3/8/2011	8:00:01 AM	Main Vac valve closed
3/8/2011	8:00:01 AM	Bubbler valve closed
3/8/2011	8:00:01 AM	Bypass valve opened
3/8/2011	8:00:01 AM	Helium MFC set to  0.000000
3/8/2011	8:00:01 AM	H2 MFC set to  0.000000
3/8/2011	8:00:01 AM	BCl3 MFC set to  0.000000
3/8/2011	8:00:01 AM	PHl3 MFC set to  0.000000
3/8/2011	8:00:01 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:00:01 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:00:01 AM	Tube furnace set to 0
3/8/2011	8:00:01 AM	Helium valve closed
3/8/2011	8:00:01 AM	H2 valve closed
3/8/2011	8:00:01 AM	BCl3 valve closed
3/8/2011	8:00:01 AM	PH3 valve closed
3/8/2011	8:00:01 AM	SiCl4 pre valve closed
3/8/2011	8:00:01 AM	SiCl4 post valve closed
3/8/2011	8:00:01 AM	Bubbler valve closed
3/8/2011	8:00:01 AM	Main Vac valve opened
3/8/2011	8:00:01 AM	Bypass valve opened
3/8/2011	8:00:01 AM	Helium MFC set to  0.000000
3/8/2011	8:00:01 AM	H2 MFC set to  0.000000
3/8/2011	8:00:01 AM	BCl3 MFC set to  0.000000
3/8/2011	8:00:01 AM	PHl3 MFC set to  0.000000
3/8/2011	8:00:01 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:00:01 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:00:02 AM	Tube furnace set to 0
3/8/2011	8:01:02 AM	H2 valve closed
3/8/2011	8:01:02 AM	BCl3 valve closed
3/8/2011	8:01:02 AM	PH3 valve closed
3/8/2011	8:01:02 AM	SiCl4 pre valve closed
3/8/2011	8:01:02 AM	SiCl4 post valve closed
3/8/2011	8:01:02 AM	Bubbler valve closed
3/8/2011	8:01:02 AM	Helium valve opened
3/8/2011	8:01:02 AM	Main Vac valve opened
3/8/2011	8:01:02 AM	Bypass valve opened
3/8/2011	8:01:02 AM	Helium MFC set to  100.000000
3/8/2011	8:01:02 AM	H2 MFC set to  0.000000
3/8/2011	8:01:02 AM	BCl3 MFC set to  0.000000
3/8/2011	8:01:02 AM	PHl3 MFC set to  0.000000
3/8/2011	8:01:02 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:01:02 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:01:02 AM	Tube furnace set to 0
3/8/2011	8:02:02 AM	Helium valve closed
3/8/2011	8:02:02 AM	H2 valve closed
3/8/2011	8:02:02 AM	BCl3 valve closed
3/8/2011	8:02:02 AM	PH3 valve closed
3/8/2011	8:02:02 AM	SiCl4 pre valve closed
3/8/2011	8:02:02 AM	SiCl4 post valve closed
3/8/2011	8:02:02 AM	Bubbler valve closed
3/8/2011	8:02:02 AM	Main Vac valve opened
3/8/2011	8:02:02 AM	Bypass valve opened
3/8/2011	8:02:02 AM	Helium MFC set to  0.000000
3/8/2011	8:02:02 AM	H2 MFC set to  0.000000
3/8/2011	8:02:02 AM	BCl3 MFC set to  0.000000
3/8/2011	8:02:02 AM	PHl3 MFC set to  0.000000
3/8/2011	8:02:02 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:02:02 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:02:02 AM	Tube furnace set to 0
3/8/2011	8:03:02 AM	H2 valve closed
3/8/2011	8:03:02 AM	BCl3 valve closed
3/8/2011	8:03:02 AM	PH3 valve closed
3/8/2011	8:03:02 AM	SiCl4 pre valve closed
3/8/2011	8:03:02 AM	SiCl4 post valve closed
3/8/2011	8:03:02 AM	Bubbler valve closed
3/8/2011	8:03:02 AM	Helium valve opened
3/8/2011	8:03:02 AM	Main Vac valve opened
3/8/2011	8:03:02 AM	Bypass valve opened
3/8/2011	8:03:02 AM	Helium MFC set to  100.000000
3/8/2011	8:03:02 AM	H2 MFC set to  0.000000
3/8/2011	8:03:02 AM	BCl3 MFC set to  0.000000
3/8/2011	8:03:02 AM	PHl3 MFC set to  0.000000
3/8/2011	8:03:02 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:03:02 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:03:02 AM	Tube furnace set to 0
3/8/2011	8:04:02 AM	Helium valve closed
3/8/2011	8:04:02 AM	H2 valve closed
3/8/2011	8:04:02 AM	BCl3 valve closed
3/8/2011	8:04:02 AM	PH3 valve closed
3/8/2011	8:04:02 AM	SiCl4 pre valve closed
3/8/2011	8:04:02 AM	SiCl4 post valve closed
3/8/2011	8:04:02 AM	Bubbler valve closed
3/8/2011	8:04:02 AM	Main Vac valve opened
3/8/2011	8:04:02 AM	Bypass valve opened
3/8/2011	8:04:02 AM	Helium MFC set to  0.000000
3/8/2011	8:04:02 AM	H2 MFC set to  0.000000
3/8/2011	8:04:02 AM	BCl3 MFC set to  0.000000
3/8/2011	8:04:02 AM	PHl3 MFC set to  0.000000
3/8/2011	8:04:02 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:04:02 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:04:02 AM	Tube furnace set to 0
3/8/2011	8:05:02 AM	H2 valve closed
3/8/2011	8:05:02 AM	BCl3 valve closed
3/8/2011	8:05:02 AM	PH3 valve closed
3/8/2011	8:05:02 AM	SiCl4 pre valve closed
3/8/2011	8:05:02 AM	SiCl4 post valve closed
3/8/2011	8:05:02 AM	Bubbler valve closed
3/8/2011	8:05:02 AM	Helium valve opened
3/8/2011	8:05:02 AM	Main Vac valve opened
3/8/2011	8:05:02 AM	Bypass valve opened
3/8/2011	8:05:02 AM	Helium MFC set to  100.000000
3/8/2011	8:05:02 AM	H2 MFC set to  0.000000
3/8/2011	8:05:02 AM	BCl3 MFC set to  0.000000
3/8/2011	8:05:02 AM	PHl3 MFC set to  0.000000
3/8/2011	8:05:02 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:05:02 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:05:03 AM	Tube furnace set to 0
3/8/2011	8:06:03 AM	Helium valve closed
3/8/2011	8:06:03 AM	H2 valve closed
3/8/2011	8:06:03 AM	BCl3 valve closed
3/8/2011	8:06:03 AM	PH3 valve closed
3/8/2011	8:06:03 AM	SiCl4 pre valve closed
3/8/2011	8:06:03 AM	SiCl4 post valve closed
3/8/2011	8:06:03 AM	Bubbler valve closed
3/8/2011	8:06:03 AM	Main Vac valve opened
3/8/2011	8:06:03 AM	Bypass valve opened
3/8/2011	8:06:03 AM	Helium MFC set to  0.000000
3/8/2011	8:06:03 AM	H2 MFC set to  0.000000
3/8/2011	8:06:03 AM	BCl3 MFC set to  0.000000
3/8/2011	8:06:03 AM	PHl3 MFC set to  0.000000
3/8/2011	8:06:03 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:06:03 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:06:03 AM	Tube furnace set to 0
3/8/2011	8:07:03 AM	H2 valve closed
3/8/2011	8:07:03 AM	BCl3 valve closed
3/8/2011	8:07:03 AM	PH3 valve closed
3/8/2011	8:07:03 AM	SiCl4 pre valve closed
3/8/2011	8:07:03 AM	SiCl4 post valve closed
3/8/2011	8:07:03 AM	Bubbler valve closed
3/8/2011	8:07:03 AM	Helium valve opened
3/8/2011	8:07:03 AM	Main Vac valve opened
3/8/2011	8:07:03 AM	Bypass valve opened
3/8/2011	8:07:03 AM	Helium MFC set to  100.000000
3/8/2011	8:07:03 AM	H2 MFC set to  0.000000
3/8/2011	8:07:03 AM	BCl3 MFC set to  0.000000
3/8/2011	8:07:03 AM	PHl3 MFC set to  0.000000
3/8/2011	8:07:03 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:07:03 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:07:03 AM	Tube furnace set to 0
3/8/2011	8:08:03 AM	Helium valve closed
3/8/2011	8:08:03 AM	H2 valve closed
3/8/2011	8:08:03 AM	BCl3 valve closed
3/8/2011	8:08:03 AM	PH3 valve closed
3/8/2011	8:08:03 AM	SiCl4 pre valve closed
3/8/2011	8:08:03 AM	SiCl4 post valve closed
3/8/2011	8:08:03 AM	Bubbler valve closed
3/8/2011	8:08:03 AM	Main Vac valve opened
3/8/2011	8:08:03 AM	Bypass valve opened
3/8/2011	8:08:03 AM	Helium MFC set to  0.000000
3/8/2011	8:08:03 AM	H2 MFC set to  0.000000
3/8/2011	8:08:03 AM	BCl3 MFC set to  0.000000
3/8/2011	8:08:03 AM	PHl3 MFC set to  0.000000
3/8/2011	8:08:03 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:08:03 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:08:03 AM	Tube furnace set to 0
3/8/2011	8:09:03 AM	H2 valve closed
3/8/2011	8:09:03 AM	BCl3 valve closed
3/8/2011	8:09:03 AM	PH3 valve closed
3/8/2011	8:09:03 AM	SiCl4 pre valve closed
3/8/2011	8:09:03 AM	SiCl4 post valve closed
3/8/2011	8:09:03 AM	Bubbler valve closed
3/8/2011	8:09:03 AM	Helium valve opened
3/8/2011	8:09:03 AM	Main Vac valve opened
3/8/2011	8:09:03 AM	Bypass valve opened
3/8/2011	8:09:03 AM	Helium MFC set to  100.000000
3/8/2011	8:09:03 AM	H2 MFC set to  0.000000
3/8/2011	8:09:03 AM	BCl3 MFC set to  0.000000
3/8/2011	8:09:03 AM	PHl3 MFC set to  0.000000
3/8/2011	8:09:03 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:09:03 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:09:03 AM	Tube furnace set to 0
3/8/2011	8:10:03 AM	Helium valve closed
3/8/2011	8:10:03 AM	H2 valve closed
3/8/2011	8:10:03 AM	BCl3 valve closed
3/8/2011	8:10:03 AM	PH3 valve closed
3/8/2011	8:10:03 AM	SiCl4 pre valve closed
3/8/2011	8:10:03 AM	SiCl4 post valve closed
3/8/2011	8:10:03 AM	Bubbler valve closed
3/8/2011	8:10:03 AM	Main Vac valve opened
3/8/2011	8:10:03 AM	Bypass valve opened
3/8/2011	8:10:03 AM	Helium MFC set to  0.000000
3/8/2011	8:10:03 AM	H2 MFC set to  0.000000
3/8/2011	8:10:03 AM	BCl3 MFC set to  0.000000
3/8/2011	8:10:03 AM	PHl3 MFC set to  0.000000
3/8/2011	8:10:03 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:10:03 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:10:04 AM	Tube furnace set to 0
3/8/2011	8:11:04 AM	H2 valve closed
3/8/2011	8:11:04 AM	BCl3 valve closed
3/8/2011	8:11:04 AM	PH3 valve closed
3/8/2011	8:11:04 AM	SiCl4 pre valve closed
3/8/2011	8:11:04 AM	SiCl4 post valve closed
3/8/2011	8:11:04 AM	Bubbler valve closed
3/8/2011	8:11:04 AM	Helium valve opened
3/8/2011	8:11:04 AM	Main Vac valve opened
3/8/2011	8:11:04 AM	Bypass valve opened
3/8/2011	8:11:04 AM	Helium MFC set to  100.000000
3/8/2011	8:11:04 AM	H2 MFC set to  0.000000
3/8/2011	8:11:04 AM	BCl3 MFC set to  0.000000
3/8/2011	8:11:04 AM	PHl3 MFC set to  0.000000
3/8/2011	8:11:04 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:11:04 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:11:04 AM	Tube furnace set to 0
3/8/2011	8:12:04 AM	Helium valve closed
3/8/2011	8:12:04 AM	H2 valve closed
3/8/2011	8:12:04 AM	BCl3 valve closed
3/8/2011	8:12:04 AM	PH3 valve closed
3/8/2011	8:12:04 AM	SiCl4 pre valve closed
3/8/2011	8:12:04 AM	SiCl4 post valve closed
3/8/2011	8:12:04 AM	Bubbler valve closed
3/8/2011	8:12:04 AM	Main Vac valve opened
3/8/2011	8:12:04 AM	Bypass valve opened
3/8/2011	8:12:04 AM	Helium MFC set to  0.000000
3/8/2011	8:12:04 AM	H2 MFC set to  0.000000
3/8/2011	8:12:04 AM	BCl3 MFC set to  0.000000
3/8/2011	8:12:04 AM	PHl3 MFC set to  0.000000
3/8/2011	8:12:04 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:12:04 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:12:04 AM	Tube furnace set to 0
3/8/2011	8:13:04 AM	H2 valve closed
3/8/2011	8:13:04 AM	BCl3 valve closed
3/8/2011	8:13:04 AM	PH3 valve closed
3/8/2011	8:13:04 AM	SiCl4 pre valve closed
3/8/2011	8:13:04 AM	SiCl4 post valve closed
3/8/2011	8:13:04 AM	Bubbler valve closed
3/8/2011	8:13:04 AM	Helium valve opened
3/8/2011	8:13:04 AM	Main Vac valve opened
3/8/2011	8:13:04 AM	Bypass valve opened
3/8/2011	8:13:04 AM	Helium MFC set to  100.000000
3/8/2011	8:13:04 AM	H2 MFC set to  0.000000
3/8/2011	8:13:04 AM	BCl3 MFC set to  0.000000
3/8/2011	8:13:04 AM	PHl3 MFC set to  0.000000
3/8/2011	8:13:04 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:13:04 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:13:04 AM	Tube furnace set to 0
3/8/2011	8:14:04 AM	Helium valve closed
3/8/2011	8:14:04 AM	H2 valve closed
3/8/2011	8:14:04 AM	BCl3 valve closed
3/8/2011	8:14:04 AM	PH3 valve closed
3/8/2011	8:14:04 AM	SiCl4 pre valve closed
3/8/2011	8:14:04 AM	SiCl4 post valve closed
3/8/2011	8:14:04 AM	Bubbler valve closed
3/8/2011	8:14:04 AM	Main Vac valve opened
3/8/2011	8:14:04 AM	Bypass valve opened
3/8/2011	8:14:04 AM	Helium MFC set to  0.000000
3/8/2011	8:14:04 AM	H2 MFC set to  0.000000
3/8/2011	8:14:04 AM	BCl3 MFC set to  0.000000
3/8/2011	8:14:04 AM	PHl3 MFC set to  0.000000
3/8/2011	8:14:04 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:14:04 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:14:04 AM	Tube furnace set to 0
3/8/2011	8:15:04 AM	H2 valve closed
3/8/2011	8:15:04 AM	BCl3 valve closed
3/8/2011	8:15:04 AM	PH3 valve closed
3/8/2011	8:15:04 AM	SiCl4 pre valve closed
3/8/2011	8:15:04 AM	SiCl4 post valve closed
3/8/2011	8:15:04 AM	Bubbler valve closed
3/8/2011	8:15:04 AM	Helium valve opened
3/8/2011	8:15:04 AM	Main Vac valve opened
3/8/2011	8:15:04 AM	Bypass valve opened
3/8/2011	8:15:04 AM	Helium MFC set to  100.000000
3/8/2011	8:15:04 AM	H2 MFC set to  0.000000
3/8/2011	8:15:04 AM	BCl3 MFC set to  0.000000
3/8/2011	8:15:04 AM	PHl3 MFC set to  0.000000
3/8/2011	8:15:04 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:15:04 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:15:05 AM	Tube furnace set to 0
3/8/2011	8:16:05 AM	Helium valve closed
3/8/2011	8:16:05 AM	H2 valve closed
3/8/2011	8:16:05 AM	BCl3 valve closed
3/8/2011	8:16:05 AM	PH3 valve closed
3/8/2011	8:16:05 AM	SiCl4 pre valve closed
3/8/2011	8:16:05 AM	SiCl4 post valve closed
3/8/2011	8:16:05 AM	Bubbler valve closed
3/8/2011	8:16:05 AM	Main Vac valve opened
3/8/2011	8:16:05 AM	Bypass valve opened
3/8/2011	8:16:05 AM	Helium MFC set to  0.000000
3/8/2011	8:16:05 AM	H2 MFC set to  0.000000
3/8/2011	8:16:05 AM	BCl3 MFC set to  0.000000
3/8/2011	8:16:05 AM	PHl3 MFC set to  0.000000
3/8/2011	8:16:05 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:16:05 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:16:05 AM	Tube furnace set to 0
3/8/2011	8:17:05 AM	H2 valve closed
3/8/2011	8:17:05 AM	BCl3 valve closed
3/8/2011	8:17:05 AM	PH3 valve closed
3/8/2011	8:17:05 AM	SiCl4 pre valve closed
3/8/2011	8:17:05 AM	SiCl4 post valve closed
3/8/2011	8:17:05 AM	Bubbler valve closed
3/8/2011	8:17:05 AM	Helium valve opened
3/8/2011	8:17:05 AM	Main Vac valve opened
3/8/2011	8:17:05 AM	Bypass valve opened
3/8/2011	8:17:05 AM	Helium MFC set to  100.000000
3/8/2011	8:17:05 AM	H2 MFC set to  0.000000
3/8/2011	8:17:05 AM	BCl3 MFC set to  0.000000
3/8/2011	8:17:05 AM	PHl3 MFC set to  0.000000
3/8/2011	8:17:05 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:17:05 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:17:05 AM	Tube furnace set to 0
3/8/2011	8:18:05 AM	Helium valve closed
3/8/2011	8:18:05 AM	H2 valve closed
3/8/2011	8:18:05 AM	BCl3 valve closed
3/8/2011	8:18:05 AM	PH3 valve closed
3/8/2011	8:18:05 AM	SiCl4 pre valve closed
3/8/2011	8:18:05 AM	SiCl4 post valve closed
3/8/2011	8:18:05 AM	Bubbler valve closed
3/8/2011	8:18:05 AM	Main Vac valve opened
3/8/2011	8:18:05 AM	Bypass valve opened
3/8/2011	8:18:05 AM	Helium MFC set to  0.000000
3/8/2011	8:18:05 AM	H2 MFC set to  0.000000
3/8/2011	8:18:05 AM	BCl3 MFC set to  0.000000
3/8/2011	8:18:05 AM	PHl3 MFC set to  0.000000
3/8/2011	8:18:05 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:18:05 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:18:05 AM	Tube furnace set to 0
3/8/2011	8:19:05 AM	H2 valve closed
3/8/2011	8:19:05 AM	BCl3 valve closed
3/8/2011	8:19:05 AM	PH3 valve closed
3/8/2011	8:19:05 AM	SiCl4 pre valve closed
3/8/2011	8:19:05 AM	SiCl4 post valve closed
3/8/2011	8:19:05 AM	Bubbler valve closed
3/8/2011	8:19:05 AM	Helium valve opened
3/8/2011	8:19:05 AM	Main Vac valve opened
3/8/2011	8:19:05 AM	Bypass valve opened
3/8/2011	8:19:05 AM	Helium MFC set to  100.000000
3/8/2011	8:19:05 AM	H2 MFC set to  0.000000
3/8/2011	8:19:05 AM	BCl3 MFC set to  0.000000
3/8/2011	8:19:05 AM	PHl3 MFC set to  0.000000
3/8/2011	8:19:05 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:19:05 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:19:05 AM	Tube furnace set to 0
3/8/2011	8:20:05 AM	Helium valve closed
3/8/2011	8:20:05 AM	H2 valve closed
3/8/2011	8:20:05 AM	BCl3 valve closed
3/8/2011	8:20:05 AM	PH3 valve closed
3/8/2011	8:20:05 AM	SiCl4 pre valve closed
3/8/2011	8:20:05 AM	SiCl4 post valve closed
3/8/2011	8:20:05 AM	Bubbler valve closed
3/8/2011	8:20:05 AM	Main Vac valve opened
3/8/2011	8:20:05 AM	Bypass valve opened
3/8/2011	8:20:05 AM	Helium MFC set to  0.000000
3/8/2011	8:20:05 AM	H2 MFC set to  0.000000
3/8/2011	8:20:05 AM	BCl3 MFC set to  0.000000
3/8/2011	8:20:05 AM	PHl3 MFC set to  0.000000
3/8/2011	8:20:05 AM	SiCl4 MFC set to  0.000000
3/8/2011	8:20:05 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	8:20:06 AM	Tube furnace set to 0
3/8/2011	8:20:07 AM	Run finished at 8:20 AM
3/8/2011	8:20:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/8/2011	9:07:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/8/2011	9:07:55 AM	Recipe started at 9:07 AM
3/8/2011	9:07:55 AM	Helium valve closed
3/8/2011	9:07:55 AM	H2 valve closed
3/8/2011	9:07:55 AM	BCl3 valve closed
3/8/2011	9:07:55 AM	PH3 valve closed
3/8/2011	9:07:55 AM	SiCl4 pre valve closed
3/8/2011	9:07:55 AM	SiCl4 post valve closed
3/8/2011	9:07:55 AM	Main Vac valve closed
3/8/2011	9:07:55 AM	Bypass valve closed
3/8/2011	9:07:55 AM	Bubbler valve closed
3/8/2011	9:07:55 AM	Helium MFC set to  0.000000
3/8/2011	9:07:55 AM	H2 MFC set to  0.000000
3/8/2011	9:07:55 AM	BCl3 MFC set to  0.000000
3/8/2011	9:07:55 AM	PHl3 MFC set to  0.000000
3/8/2011	9:07:55 AM	SiCl4 MFC set to  0.000000
3/8/2011	9:07:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	9:07:55 AM	Tube furnace set to 0
3/8/2011	9:07:55 AM	Run finished at 9:07 AM
3/8/2011	9:07:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/8/2011	9:08:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	9:08:32 AM	Recipe started at 9:08 AM
3/8/2011	9:08:32 AM	Helium valve closed
3/8/2011	9:08:32 AM	H2 valve closed
3/8/2011	9:08:32 AM	BCl3 valve closed
3/8/2011	9:08:32 AM	PH3 valve closed
3/8/2011	9:08:32 AM	SiCl4 pre valve closed
3/8/2011	9:08:32 AM	SiCl4 post valve closed
3/8/2011	9:08:32 AM	Main Vac valve closed
3/8/2011	9:08:32 AM	Bubbler valve closed
3/8/2011	9:08:32 AM	Bypass valve opened
3/8/2011	9:08:32 AM	Helium MFC set to  0.000000
3/8/2011	9:08:32 AM	H2 MFC set to  0.000000
3/8/2011	9:08:32 AM	BCl3 MFC set to  0.000000
3/8/2011	9:08:32 AM	PHl3 MFC set to  0.000000
3/8/2011	9:08:32 AM	SiCl4 MFC set to  0.000000
3/8/2011	9:08:32 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	9:08:33 AM	Tube furnace set to 0
3/8/2011	9:08:33 AM	Helium valve closed
3/8/2011	9:08:33 AM	H2 valve closed
3/8/2011	9:08:33 AM	BCl3 valve closed
3/8/2011	9:08:33 AM	PH3 valve closed
3/8/2011	9:08:33 AM	SiCl4 pre valve closed
3/8/2011	9:08:33 AM	SiCl4 post valve closed
3/8/2011	9:08:33 AM	Bubbler valve closed
3/8/2011	9:08:33 AM	Main Vac valve opened
3/8/2011	9:08:33 AM	Bypass valve opened
3/8/2011	9:08:33 AM	Helium MFC set to  0.000000
3/8/2011	9:08:33 AM	H2 MFC set to  0.000000
3/8/2011	9:08:33 AM	BCl3 MFC set to  0.000000
3/8/2011	9:08:33 AM	PHl3 MFC set to  0.000000
3/8/2011	9:08:33 AM	SiCl4 MFC set to  0.000000
3/8/2011	9:08:33 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	9:08:33 AM	Tube furnace set to 0
3/8/2011	9:08:33 AM	Run finished at 9:08 AM
3/8/2011	9:08:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	9:08:59 AM	Recipe started at 9:08 AM
3/8/2011	9:08:59 AM	Helium valve closed
3/8/2011	9:08:59 AM	BCl3 valve closed
3/8/2011	9:08:59 AM	PH3 valve closed
3/8/2011	9:08:59 AM	SiCl4 pre valve closed
3/8/2011	9:08:59 AM	SiCl4 post valve closed
3/8/2011	9:08:59 AM	Main Vac valve closed
3/8/2011	9:08:59 AM	Bypass valve closed
3/8/2011	9:08:59 AM	Bubbler valve closed
3/8/2011	9:08:59 AM	H2 valve opened
3/8/2011	9:08:59 AM	Helium MFC set to  0.000000
3/8/2011	9:08:59 AM	H2 MFC set to  500.000000
3/8/2011	9:08:59 AM	BCl3 MFC set to  0.000000
3/8/2011	9:08:59 AM	PHl3 MFC set to  0.000000
3/8/2011	9:08:59 AM	SiCl4 MFC set to  0.000000
3/8/2011	9:08:59 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	9:08:59 AM	Tube furnace set to 0
3/8/2011	9:10:22 AM	Helium valve closed
3/8/2011	9:10:22 AM	BCl3 valve closed
3/8/2011	9:10:22 AM	PH3 valve closed
3/8/2011	9:10:22 AM	SiCl4 pre valve closed
3/8/2011	9:10:22 AM	SiCl4 post valve closed
3/8/2011	9:10:22 AM	Main Vac valve closed
3/8/2011	9:10:22 AM	Bypass valve closed
3/8/2011	9:10:22 AM	H2 valve opened
3/8/2011	9:10:22 AM	Bubbler valve opened
3/8/2011	9:10:22 AM	Helium MFC set to  0.000000
3/8/2011	9:10:22 AM	H2 MFC set to  500.000000
3/8/2011	9:10:22 AM	BCl3 MFC set to  0.000000
3/8/2011	9:10:22 AM	PHl3 MFC set to  0.000000
3/8/2011	9:10:22 AM	SiCl4 MFC set to  0.000000
3/8/2011	9:10:22 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	9:10:22 AM	Tube furnace set to 1000
3/8/2011	9:30:22 AM	Helium valve closed
3/8/2011	9:30:22 AM	PH3 valve closed
3/8/2011	9:30:22 AM	Main Vac valve closed
3/8/2011	9:30:22 AM	Bypass valve closed
3/8/2011	9:30:22 AM	H2 valve opened
3/8/2011	9:30:22 AM	BCl3 valve opened
3/8/2011	9:30:22 AM	SiCl4 pre valve opened
3/8/2011	9:30:22 AM	SiCl4 post valve opened
3/8/2011	9:30:22 AM	Bubbler valve opened
3/8/2011	9:30:22 AM	Helium MFC set to  0.000000
3/8/2011	9:30:22 AM	H2 MFC set to  500.000000
3/8/2011	9:30:22 AM	BCl3 MFC set to  3.000000
3/8/2011	9:30:22 AM	PHl3 MFC set to  0.000000
3/8/2011	9:30:22 AM	SiCl4 MFC set to  50.000000
3/8/2011	9:30:22 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	9:30:22 AM	Tube furnace set to 1000
3/8/2011	9:45:22 AM	H2 valve closed
3/8/2011	9:45:22 AM	BCl3 valve closed
3/8/2011	9:45:22 AM	PH3 valve closed
3/8/2011	9:45:22 AM	SiCl4 pre valve closed
3/8/2011	9:45:22 AM	SiCl4 post valve closed
3/8/2011	9:45:22 AM	Main Vac valve closed
3/8/2011	9:45:22 AM	Bypass valve closed
3/8/2011	9:45:22 AM	Helium valve opened
3/8/2011	9:45:22 AM	Bubbler valve opened
3/8/2011	9:45:22 AM	Helium MFC set to  500.000000
3/8/2011	9:45:22 AM	H2 MFC set to  0.000000
3/8/2011	9:45:22 AM	BCl3 MFC set to  0.000000
3/8/2011	9:45:22 AM	PHl3 MFC set to  0.000000
3/8/2011	9:45:22 AM	SiCl4 MFC set to  0.000000
3/8/2011	9:45:22 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	9:45:22 AM	Tube furnace set to 0
3/8/2011	10:05:22 AM	Helium valve closed
3/8/2011	10:05:22 AM	H2 valve closed
3/8/2011	10:05:22 AM	BCl3 valve closed
3/8/2011	10:05:22 AM	PH3 valve closed
3/8/2011	10:05:22 AM	SiCl4 pre valve closed
3/8/2011	10:05:22 AM	SiCl4 post valve closed
3/8/2011	10:05:22 AM	Main Vac valve closed
3/8/2011	10:05:22 AM	Bypass valve closed
3/8/2011	10:05:22 AM	Bubbler valve closed
3/8/2011	10:05:22 AM	Helium MFC set to  0.000000
3/8/2011	10:05:22 AM	H2 MFC set to  0.000000
3/8/2011	10:05:22 AM	BCl3 MFC set to  0.000000
3/8/2011	10:05:22 AM	PHl3 MFC set to  0.000000
3/8/2011	10:05:22 AM	SiCl4 MFC set to  0.000000
3/8/2011	10:05:22 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:05:22 AM	Tube furnace set to 0
3/8/2011	10:05:23 AM	Run finished at 10:05 AM
3/8/2011	11:07:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	11:07:57 AM	Recipe started at 11:07 AM
3/8/2011	11:07:58 AM	H2 valve closed
3/8/2011	11:07:58 AM	BCl3 valve closed
3/8/2011	11:07:58 AM	PH3 valve closed
3/8/2011	11:07:58 AM	SiCl4 pre valve closed
3/8/2011	11:07:58 AM	SiCl4 post valve closed
3/8/2011	11:07:58 AM	Main Vac valve closed
3/8/2011	11:07:58 AM	Bypass valve closed
3/8/2011	11:07:58 AM	Bubbler valve closed
3/8/2011	11:07:58 AM	Helium valve opened
3/8/2011	11:07:58 AM	Helium MFC set to  500.000000
3/8/2011	11:07:58 AM	H2 MFC set to  0.000000
3/8/2011	11:07:58 AM	BCl3 MFC set to  0.000000
3/8/2011	11:07:58 AM	PHl3 MFC set to  0.000000
3/8/2011	11:07:58 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:07:58 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:07:58 AM	Tube furnace set to 0
3/8/2011	11:08:00 AM	Helium valve closed
3/8/2011	11:08:00 AM	H2 valve closed
3/8/2011	11:08:00 AM	BCl3 valve closed
3/8/2011	11:08:00 AM	PH3 valve closed
3/8/2011	11:08:00 AM	SiCl4 pre valve closed
3/8/2011	11:08:00 AM	SiCl4 post valve closed
3/8/2011	11:08:00 AM	Main Vac valve closed
3/8/2011	11:08:00 AM	Bypass valve closed
3/8/2011	11:08:00 AM	Bubbler valve closed
3/8/2011	11:08:00 AM	Helium MFC set to  0.000000
3/8/2011	11:08:00 AM	H2 MFC set to  0.000000
3/8/2011	11:08:00 AM	BCl3 MFC set to  0.000000
3/8/2011	11:08:00 AM	PHl3 MFC set to  0.000000
3/8/2011	11:08:00 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:08:00 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:08:01 AM	Tube furnace set to 0
3/8/2011	11:08:01 AM	Run finished at 11:08 AM
3/8/2011	11:08:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	11:14:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	11:14:56 AM	Recipe started at 11:14 AM
3/8/2011	11:14:56 AM	Helium valve closed
3/8/2011	11:14:56 AM	H2 valve closed
3/8/2011	11:14:56 AM	BCl3 valve closed
3/8/2011	11:14:56 AM	PH3 valve closed
3/8/2011	11:14:56 AM	SiCl4 pre valve closed
3/8/2011	11:14:56 AM	SiCl4 post valve closed
3/8/2011	11:14:56 AM	Main Vac valve closed
3/8/2011	11:14:56 AM	Bubbler valve closed
3/8/2011	11:14:56 AM	Bypass valve opened
3/8/2011	11:14:56 AM	Helium MFC set to  0.000000
3/8/2011	11:14:56 AM	H2 MFC set to  0.000000
3/8/2011	11:14:56 AM	BCl3 MFC set to  0.000000
3/8/2011	11:14:56 AM	PHl3 MFC set to  0.000000
3/8/2011	11:14:56 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:14:56 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:14:56 AM	Tube furnace set to 0
3/8/2011	11:15:28 AM	Helium valve closed
3/8/2011	11:15:28 AM	H2 valve closed
3/8/2011	11:15:28 AM	BCl3 valve closed
3/8/2011	11:15:28 AM	PH3 valve closed
3/8/2011	11:15:28 AM	SiCl4 pre valve closed
3/8/2011	11:15:28 AM	SiCl4 post valve closed
3/8/2011	11:15:28 AM	Bubbler valve closed
3/8/2011	11:15:28 AM	Main Vac valve opened
3/8/2011	11:15:28 AM	Bypass valve opened
3/8/2011	11:15:28 AM	Helium MFC set to  0.000000
3/8/2011	11:15:28 AM	H2 MFC set to  0.000000
3/8/2011	11:15:28 AM	BCl3 MFC set to  0.000000
3/8/2011	11:15:28 AM	PHl3 MFC set to  0.000000
3/8/2011	11:15:28 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:15:28 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:15:28 AM	Tube furnace set to 0
3/8/2011	11:15:29 AM	Run finished at 11:15 AM
3/8/2011	11:15:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	11:16:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/8/2011	11:16:54 AM	Recipe started at 11:16 AM
3/8/2011	11:16:54 AM	Helium valve closed
3/8/2011	11:16:54 AM	H2 valve closed
3/8/2011	11:16:54 AM	BCl3 valve closed
3/8/2011	11:16:54 AM	PH3 valve closed
3/8/2011	11:16:54 AM	SiCl4 pre valve closed
3/8/2011	11:16:54 AM	SiCl4 post valve closed
3/8/2011	11:16:54 AM	Main Vac valve closed
3/8/2011	11:16:54 AM	Bubbler valve closed
3/8/2011	11:16:54 AM	Bypass valve opened
3/8/2011	11:16:54 AM	Helium MFC set to  0.000000
3/8/2011	11:16:54 AM	H2 MFC set to  0.000000
3/8/2011	11:16:54 AM	BCl3 MFC set to  0.000000
3/8/2011	11:16:54 AM	PHl3 MFC set to  0.000000
3/8/2011	11:16:54 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:16:54 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:16:54 AM	Tube furnace set to 0
3/8/2011	11:16:54 AM	Helium valve closed
3/8/2011	11:16:54 AM	H2 valve closed
3/8/2011	11:16:54 AM	BCl3 valve closed
3/8/2011	11:16:54 AM	PH3 valve closed
3/8/2011	11:16:54 AM	SiCl4 pre valve closed
3/8/2011	11:16:54 AM	SiCl4 post valve closed
3/8/2011	11:16:54 AM	Bubbler valve closed
3/8/2011	11:16:54 AM	Main Vac valve opened
3/8/2011	11:16:54 AM	Bypass valve opened
3/8/2011	11:16:54 AM	Helium MFC set to  0.000000
3/8/2011	11:16:54 AM	H2 MFC set to  0.000000
3/8/2011	11:16:54 AM	BCl3 MFC set to  0.000000
3/8/2011	11:16:54 AM	PHl3 MFC set to  0.000000
3/8/2011	11:16:54 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:16:54 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:16:55 AM	Tube furnace set to 0
3/8/2011	11:17:55 AM	H2 valve closed
3/8/2011	11:17:55 AM	BCl3 valve closed
3/8/2011	11:17:55 AM	PH3 valve closed
3/8/2011	11:17:55 AM	SiCl4 pre valve closed
3/8/2011	11:17:55 AM	SiCl4 post valve closed
3/8/2011	11:17:55 AM	Bubbler valve closed
3/8/2011	11:17:55 AM	Helium valve opened
3/8/2011	11:17:55 AM	Main Vac valve opened
3/8/2011	11:17:55 AM	Bypass valve opened
3/8/2011	11:17:55 AM	Helium MFC set to  100.000000
3/8/2011	11:17:55 AM	H2 MFC set to  0.000000
3/8/2011	11:17:55 AM	BCl3 MFC set to  0.000000
3/8/2011	11:17:55 AM	PHl3 MFC set to  0.000000
3/8/2011	11:17:55 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:17:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:17:55 AM	Tube furnace set to 0
3/8/2011	11:18:55 AM	Helium valve closed
3/8/2011	11:18:55 AM	H2 valve closed
3/8/2011	11:18:55 AM	BCl3 valve closed
3/8/2011	11:18:55 AM	PH3 valve closed
3/8/2011	11:18:55 AM	SiCl4 pre valve closed
3/8/2011	11:18:55 AM	SiCl4 post valve closed
3/8/2011	11:18:55 AM	Bubbler valve closed
3/8/2011	11:18:55 AM	Main Vac valve opened
3/8/2011	11:18:55 AM	Bypass valve opened
3/8/2011	11:18:55 AM	Helium MFC set to  0.000000
3/8/2011	11:18:55 AM	H2 MFC set to  0.000000
3/8/2011	11:18:55 AM	BCl3 MFC set to  0.000000
3/8/2011	11:18:55 AM	PHl3 MFC set to  0.000000
3/8/2011	11:18:55 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:18:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:18:55 AM	Tube furnace set to 0
3/8/2011	11:19:55 AM	H2 valve closed
3/8/2011	11:19:55 AM	BCl3 valve closed
3/8/2011	11:19:55 AM	PH3 valve closed
3/8/2011	11:19:55 AM	SiCl4 pre valve closed
3/8/2011	11:19:55 AM	SiCl4 post valve closed
3/8/2011	11:19:55 AM	Bubbler valve closed
3/8/2011	11:19:55 AM	Helium valve opened
3/8/2011	11:19:55 AM	Main Vac valve opened
3/8/2011	11:19:55 AM	Bypass valve opened
3/8/2011	11:19:55 AM	Helium MFC set to  100.000000
3/8/2011	11:19:55 AM	H2 MFC set to  0.000000
3/8/2011	11:19:55 AM	BCl3 MFC set to  0.000000
3/8/2011	11:19:55 AM	PHl3 MFC set to  0.000000
3/8/2011	11:19:55 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:19:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:19:55 AM	Tube furnace set to 0
3/8/2011	11:20:55 AM	Helium valve closed
3/8/2011	11:20:55 AM	H2 valve closed
3/8/2011	11:20:55 AM	BCl3 valve closed
3/8/2011	11:20:55 AM	PH3 valve closed
3/8/2011	11:20:55 AM	SiCl4 pre valve closed
3/8/2011	11:20:55 AM	SiCl4 post valve closed
3/8/2011	11:20:55 AM	Bubbler valve closed
3/8/2011	11:20:55 AM	Main Vac valve opened
3/8/2011	11:20:55 AM	Bypass valve opened
3/8/2011	11:20:55 AM	Helium MFC set to  0.000000
3/8/2011	11:20:55 AM	H2 MFC set to  0.000000
3/8/2011	11:20:55 AM	BCl3 MFC set to  0.000000
3/8/2011	11:20:55 AM	PHl3 MFC set to  0.000000
3/8/2011	11:20:55 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:20:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:20:55 AM	Tube furnace set to 0
3/8/2011	11:21:55 AM	H2 valve closed
3/8/2011	11:21:55 AM	BCl3 valve closed
3/8/2011	11:21:55 AM	PH3 valve closed
3/8/2011	11:21:55 AM	SiCl4 pre valve closed
3/8/2011	11:21:55 AM	SiCl4 post valve closed
3/8/2011	11:21:55 AM	Bubbler valve closed
3/8/2011	11:21:55 AM	Helium valve opened
3/8/2011	11:21:55 AM	Main Vac valve opened
3/8/2011	11:21:55 AM	Bypass valve opened
3/8/2011	11:21:55 AM	Helium MFC set to  100.000000
3/8/2011	11:21:55 AM	H2 MFC set to  0.000000
3/8/2011	11:21:55 AM	BCl3 MFC set to  0.000000
3/8/2011	11:21:55 AM	PHl3 MFC set to  0.000000
3/8/2011	11:21:55 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:21:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:21:56 AM	Tube furnace set to 0
3/8/2011	11:22:56 AM	Helium valve closed
3/8/2011	11:22:56 AM	H2 valve closed
3/8/2011	11:22:56 AM	BCl3 valve closed
3/8/2011	11:22:56 AM	PH3 valve closed
3/8/2011	11:22:56 AM	SiCl4 pre valve closed
3/8/2011	11:22:56 AM	SiCl4 post valve closed
3/8/2011	11:22:56 AM	Bubbler valve closed
3/8/2011	11:22:56 AM	Main Vac valve opened
3/8/2011	11:22:56 AM	Bypass valve opened
3/8/2011	11:22:56 AM	Helium MFC set to  0.000000
3/8/2011	11:22:56 AM	H2 MFC set to  0.000000
3/8/2011	11:22:56 AM	BCl3 MFC set to  0.000000
3/8/2011	11:22:56 AM	PHl3 MFC set to  0.000000
3/8/2011	11:22:56 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:22:56 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:22:56 AM	Tube furnace set to 0
3/8/2011	11:23:56 AM	H2 valve closed
3/8/2011	11:23:56 AM	BCl3 valve closed
3/8/2011	11:23:56 AM	PH3 valve closed
3/8/2011	11:23:56 AM	SiCl4 pre valve closed
3/8/2011	11:23:56 AM	SiCl4 post valve closed
3/8/2011	11:23:56 AM	Bubbler valve closed
3/8/2011	11:23:56 AM	Helium valve opened
3/8/2011	11:23:56 AM	Main Vac valve opened
3/8/2011	11:23:56 AM	Bypass valve opened
3/8/2011	11:23:56 AM	Helium MFC set to  100.000000
3/8/2011	11:23:56 AM	H2 MFC set to  0.000000
3/8/2011	11:23:56 AM	BCl3 MFC set to  0.000000
3/8/2011	11:23:56 AM	PHl3 MFC set to  0.000000
3/8/2011	11:23:56 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:23:56 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:23:56 AM	Tube furnace set to 0
3/8/2011	11:24:56 AM	Helium valve closed
3/8/2011	11:24:56 AM	H2 valve closed
3/8/2011	11:24:56 AM	BCl3 valve closed
3/8/2011	11:24:56 AM	PH3 valve closed
3/8/2011	11:24:56 AM	SiCl4 pre valve closed
3/8/2011	11:24:56 AM	SiCl4 post valve closed
3/8/2011	11:24:56 AM	Bubbler valve closed
3/8/2011	11:24:56 AM	Main Vac valve opened
3/8/2011	11:24:56 AM	Bypass valve opened
3/8/2011	11:24:56 AM	Helium MFC set to  0.000000
3/8/2011	11:24:56 AM	H2 MFC set to  0.000000
3/8/2011	11:24:56 AM	BCl3 MFC set to  0.000000
3/8/2011	11:24:56 AM	PHl3 MFC set to  0.000000
3/8/2011	11:24:56 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:24:56 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:24:56 AM	Tube furnace set to 0
3/8/2011	11:25:56 AM	H2 valve closed
3/8/2011	11:25:56 AM	BCl3 valve closed
3/8/2011	11:25:56 AM	PH3 valve closed
3/8/2011	11:25:56 AM	SiCl4 pre valve closed
3/8/2011	11:25:56 AM	SiCl4 post valve closed
3/8/2011	11:25:56 AM	Bubbler valve closed
3/8/2011	11:25:56 AM	Helium valve opened
3/8/2011	11:25:56 AM	Main Vac valve opened
3/8/2011	11:25:56 AM	Bypass valve opened
3/8/2011	11:25:56 AM	Helium MFC set to  100.000000
3/8/2011	11:25:56 AM	H2 MFC set to  0.000000
3/8/2011	11:25:56 AM	BCl3 MFC set to  0.000000
3/8/2011	11:25:56 AM	PHl3 MFC set to  0.000000
3/8/2011	11:25:56 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:25:56 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:25:56 AM	Tube furnace set to 0
3/8/2011	11:26:56 AM	Helium valve closed
3/8/2011	11:26:56 AM	H2 valve closed
3/8/2011	11:26:56 AM	BCl3 valve closed
3/8/2011	11:26:56 AM	PH3 valve closed
3/8/2011	11:26:56 AM	SiCl4 pre valve closed
3/8/2011	11:26:56 AM	SiCl4 post valve closed
3/8/2011	11:26:56 AM	Bubbler valve closed
3/8/2011	11:26:57 AM	Main Vac valve opened
3/8/2011	11:26:57 AM	Bypass valve opened
3/8/2011	11:26:57 AM	Helium MFC set to  0.000000
3/8/2011	11:26:57 AM	H2 MFC set to  0.000000
3/8/2011	11:26:57 AM	BCl3 MFC set to  0.000000
3/8/2011	11:26:57 AM	PHl3 MFC set to  0.000000
3/8/2011	11:26:57 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:26:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:26:57 AM	Tube furnace set to 0
3/8/2011	11:27:57 AM	H2 valve closed
3/8/2011	11:27:57 AM	BCl3 valve closed
3/8/2011	11:27:57 AM	PH3 valve closed
3/8/2011	11:27:57 AM	SiCl4 pre valve closed
3/8/2011	11:27:57 AM	SiCl4 post valve closed
3/8/2011	11:27:57 AM	Bubbler valve closed
3/8/2011	11:27:57 AM	Helium valve opened
3/8/2011	11:27:57 AM	Main Vac valve opened
3/8/2011	11:27:57 AM	Bypass valve opened
3/8/2011	11:27:57 AM	Helium MFC set to  100.000000
3/8/2011	11:27:57 AM	H2 MFC set to  0.000000
3/8/2011	11:27:57 AM	BCl3 MFC set to  0.000000
3/8/2011	11:27:57 AM	PHl3 MFC set to  0.000000
3/8/2011	11:27:57 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:27:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:27:57 AM	Tube furnace set to 0
3/8/2011	11:28:57 AM	Helium valve closed
3/8/2011	11:28:57 AM	H2 valve closed
3/8/2011	11:28:57 AM	BCl3 valve closed
3/8/2011	11:28:57 AM	PH3 valve closed
3/8/2011	11:28:57 AM	SiCl4 pre valve closed
3/8/2011	11:28:57 AM	SiCl4 post valve closed
3/8/2011	11:28:57 AM	Bubbler valve closed
3/8/2011	11:28:57 AM	Main Vac valve opened
3/8/2011	11:28:57 AM	Bypass valve opened
3/8/2011	11:28:57 AM	Helium MFC set to  0.000000
3/8/2011	11:28:57 AM	H2 MFC set to  0.000000
3/8/2011	11:28:57 AM	BCl3 MFC set to  0.000000
3/8/2011	11:28:57 AM	PHl3 MFC set to  0.000000
3/8/2011	11:28:57 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:28:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:28:57 AM	Tube furnace set to 0
3/8/2011	11:29:57 AM	H2 valve closed
3/8/2011	11:29:57 AM	BCl3 valve closed
3/8/2011	11:29:57 AM	PH3 valve closed
3/8/2011	11:29:57 AM	SiCl4 pre valve closed
3/8/2011	11:29:57 AM	SiCl4 post valve closed
3/8/2011	11:29:57 AM	Bubbler valve closed
3/8/2011	11:29:57 AM	Helium valve opened
3/8/2011	11:29:57 AM	Main Vac valve opened
3/8/2011	11:29:57 AM	Bypass valve opened
3/8/2011	11:29:57 AM	Helium MFC set to  100.000000
3/8/2011	11:29:57 AM	H2 MFC set to  0.000000
3/8/2011	11:29:57 AM	BCl3 MFC set to  0.000000
3/8/2011	11:29:57 AM	PHl3 MFC set to  0.000000
3/8/2011	11:29:57 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:29:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:29:57 AM	Tube furnace set to 0
3/8/2011	11:30:57 AM	Helium valve closed
3/8/2011	11:30:57 AM	H2 valve closed
3/8/2011	11:30:57 AM	BCl3 valve closed
3/8/2011	11:30:57 AM	PH3 valve closed
3/8/2011	11:30:57 AM	SiCl4 pre valve closed
3/8/2011	11:30:57 AM	SiCl4 post valve closed
3/8/2011	11:30:57 AM	Bubbler valve closed
3/8/2011	11:30:57 AM	Main Vac valve opened
3/8/2011	11:30:57 AM	Bypass valve opened
3/8/2011	11:30:57 AM	Helium MFC set to  0.000000
3/8/2011	11:30:57 AM	H2 MFC set to  0.000000
3/8/2011	11:30:57 AM	BCl3 MFC set to  0.000000
3/8/2011	11:30:57 AM	PHl3 MFC set to  0.000000
3/8/2011	11:30:57 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:30:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:30:57 AM	Tube furnace set to 0
3/8/2011	11:31:57 AM	H2 valve closed
3/8/2011	11:31:57 AM	BCl3 valve closed
3/8/2011	11:31:57 AM	PH3 valve closed
3/8/2011	11:31:57 AM	SiCl4 pre valve closed
3/8/2011	11:31:57 AM	SiCl4 post valve closed
3/8/2011	11:31:57 AM	Bubbler valve closed
3/8/2011	11:31:57 AM	Helium valve opened
3/8/2011	11:31:57 AM	Main Vac valve opened
3/8/2011	11:31:57 AM	Bypass valve opened
3/8/2011	11:31:57 AM	Helium MFC set to  100.000000
3/8/2011	11:31:57 AM	H2 MFC set to  0.000000
3/8/2011	11:31:58 AM	BCl3 MFC set to  0.000000
3/8/2011	11:31:58 AM	PHl3 MFC set to  0.000000
3/8/2011	11:31:58 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:31:58 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:31:58 AM	Tube furnace set to 0
3/8/2011	11:32:58 AM	Helium valve closed
3/8/2011	11:32:58 AM	H2 valve closed
3/8/2011	11:32:58 AM	BCl3 valve closed
3/8/2011	11:32:58 AM	PH3 valve closed
3/8/2011	11:32:58 AM	SiCl4 pre valve closed
3/8/2011	11:32:58 AM	SiCl4 post valve closed
3/8/2011	11:32:58 AM	Bubbler valve closed
3/8/2011	11:32:58 AM	Main Vac valve opened
3/8/2011	11:32:58 AM	Bypass valve opened
3/8/2011	11:32:58 AM	Helium MFC set to  0.000000
3/8/2011	11:32:58 AM	H2 MFC set to  0.000000
3/8/2011	11:32:58 AM	BCl3 MFC set to  0.000000
3/8/2011	11:32:58 AM	PHl3 MFC set to  0.000000
3/8/2011	11:32:58 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:32:58 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:32:58 AM	Tube furnace set to 0
3/8/2011	11:33:58 AM	H2 valve closed
3/8/2011	11:33:58 AM	BCl3 valve closed
3/8/2011	11:33:58 AM	PH3 valve closed
3/8/2011	11:33:58 AM	SiCl4 pre valve closed
3/8/2011	11:33:58 AM	SiCl4 post valve closed
3/8/2011	11:33:58 AM	Bubbler valve closed
3/8/2011	11:33:58 AM	Helium valve opened
3/8/2011	11:33:58 AM	Main Vac valve opened
3/8/2011	11:33:58 AM	Bypass valve opened
3/8/2011	11:33:58 AM	Helium MFC set to  100.000000
3/8/2011	11:33:58 AM	H2 MFC set to  0.000000
3/8/2011	11:33:58 AM	BCl3 MFC set to  0.000000
3/8/2011	11:33:58 AM	PHl3 MFC set to  0.000000
3/8/2011	11:33:58 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:33:58 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:33:58 AM	Tube furnace set to 0
3/8/2011	11:34:58 AM	Helium valve closed
3/8/2011	11:34:58 AM	H2 valve closed
3/8/2011	11:34:58 AM	BCl3 valve closed
3/8/2011	11:34:58 AM	PH3 valve closed
3/8/2011	11:34:58 AM	SiCl4 pre valve closed
3/8/2011	11:34:58 AM	SiCl4 post valve closed
3/8/2011	11:34:58 AM	Bubbler valve closed
3/8/2011	11:34:58 AM	Main Vac valve opened
3/8/2011	11:34:58 AM	Bypass valve opened
3/8/2011	11:34:58 AM	Helium MFC set to  0.000000
3/8/2011	11:34:58 AM	H2 MFC set to  0.000000
3/8/2011	11:34:58 AM	BCl3 MFC set to  0.000000
3/8/2011	11:34:58 AM	PHl3 MFC set to  0.000000
3/8/2011	11:34:58 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:34:58 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:34:58 AM	Tube furnace set to 0
3/8/2011	11:35:58 AM	H2 valve closed
3/8/2011	11:35:58 AM	BCl3 valve closed
3/8/2011	11:35:58 AM	PH3 valve closed
3/8/2011	11:35:58 AM	SiCl4 pre valve closed
3/8/2011	11:35:58 AM	SiCl4 post valve closed
3/8/2011	11:35:58 AM	Bubbler valve closed
3/8/2011	11:35:58 AM	Helium valve opened
3/8/2011	11:35:58 AM	Main Vac valve opened
3/8/2011	11:35:58 AM	Bypass valve opened
3/8/2011	11:35:58 AM	Helium MFC set to  100.000000
3/8/2011	11:35:58 AM	H2 MFC set to  0.000000
3/8/2011	11:35:58 AM	BCl3 MFC set to  0.000000
3/8/2011	11:35:58 AM	PHl3 MFC set to  0.000000
3/8/2011	11:35:58 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:35:58 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:35:58 AM	Tube furnace set to 0
3/8/2011	11:36:58 AM	Helium valve closed
3/8/2011	11:36:58 AM	H2 valve closed
3/8/2011	11:36:58 AM	BCl3 valve closed
3/8/2011	11:36:58 AM	PH3 valve closed
3/8/2011	11:36:58 AM	SiCl4 pre valve closed
3/8/2011	11:36:58 AM	SiCl4 post valve closed
3/8/2011	11:36:58 AM	Bubbler valve closed
3/8/2011	11:36:58 AM	Main Vac valve opened
3/8/2011	11:36:58 AM	Bypass valve opened
3/8/2011	11:36:58 AM	Helium MFC set to  0.000000
3/8/2011	11:36:58 AM	H2 MFC set to  0.000000
3/8/2011	11:36:58 AM	BCl3 MFC set to  0.000000
3/8/2011	11:36:58 AM	PHl3 MFC set to  0.000000
3/8/2011	11:36:58 AM	SiCl4 MFC set to  0.000000
3/8/2011	11:36:58 AM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:36:59 AM	Tube furnace set to 0
3/8/2011	11:37:00 AM	Run finished at 11:37 AM
3/8/2011	11:37:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/8/2011	2:40:34 PM	Recipe started at 2:40 PM
3/8/2011	2:40:34 PM	Helium valve closed
3/8/2011	2:40:34 PM	BCl3 valve closed
3/8/2011	2:40:34 PM	PH3 valve closed
3/8/2011	2:40:34 PM	SiCl4 pre valve closed
3/8/2011	2:40:34 PM	SiCl4 post valve closed
3/8/2011	2:40:34 PM	Main Vac valve closed
3/8/2011	2:40:34 PM	Bypass valve closed
3/8/2011	2:40:34 PM	Bubbler valve closed
3/8/2011	2:40:34 PM	H2 valve opened
3/8/2011	2:40:34 PM	Helium MFC set to  0.000000
3/8/2011	2:40:34 PM	H2 MFC set to  500.000000
3/8/2011	2:40:34 PM	BCl3 MFC set to  0.000000
3/8/2011	2:40:34 PM	PHl3 MFC set to  0.000000
3/8/2011	2:40:34 PM	SiCl4 MFC set to  0.000000
3/8/2011	2:40:34 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	2:40:34 PM	Tube furnace set to 0
3/8/2011	2:41:56 PM	Helium valve closed
3/8/2011	2:41:56 PM	BCl3 valve closed
3/8/2011	2:41:56 PM	PH3 valve closed
3/8/2011	2:41:56 PM	SiCl4 pre valve closed
3/8/2011	2:41:56 PM	SiCl4 post valve closed
3/8/2011	2:41:56 PM	Main Vac valve closed
3/8/2011	2:41:56 PM	Bypass valve closed
3/8/2011	2:41:56 PM	H2 valve opened
3/8/2011	2:41:56 PM	Bubbler valve opened
3/8/2011	2:41:56 PM	Helium MFC set to  0.000000
3/8/2011	2:41:56 PM	H2 MFC set to  500.000000
3/8/2011	2:41:56 PM	BCl3 MFC set to  0.000000
3/8/2011	2:41:56 PM	PHl3 MFC set to  0.000000
3/8/2011	2:41:56 PM	SiCl4 MFC set to  0.000000
3/8/2011	2:41:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	2:41:56 PM	Tube furnace set to 1000
3/8/2011	3:01:56 PM	Helium valve closed
3/8/2011	3:01:56 PM	PH3 valve closed
3/8/2011	3:01:56 PM	Main Vac valve closed
3/8/2011	3:01:56 PM	Bypass valve closed
3/8/2011	3:01:56 PM	H2 valve opened
3/8/2011	3:01:56 PM	BCl3 valve opened
3/8/2011	3:01:56 PM	SiCl4 pre valve opened
3/8/2011	3:01:56 PM	SiCl4 post valve opened
3/8/2011	3:01:56 PM	Bubbler valve opened
3/8/2011	3:01:56 PM	Helium MFC set to  0.000000
3/8/2011	3:01:56 PM	H2 MFC set to  500.000000
3/8/2011	3:01:56 PM	BCl3 MFC set to  3.000000
3/8/2011	3:01:56 PM	PHl3 MFC set to  0.000000
3/8/2011	3:01:56 PM	SiCl4 MFC set to  50.000000
3/8/2011	3:01:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	3:01:56 PM	Tube furnace set to 1000
3/8/2011	3:16:56 PM	H2 valve closed
3/8/2011	3:16:56 PM	BCl3 valve closed
3/8/2011	3:16:56 PM	PH3 valve closed
3/8/2011	3:16:56 PM	SiCl4 pre valve closed
3/8/2011	3:16:56 PM	SiCl4 post valve closed
3/8/2011	3:16:56 PM	Main Vac valve closed
3/8/2011	3:16:56 PM	Bypass valve closed
3/8/2011	3:16:56 PM	Helium valve opened
3/8/2011	3:16:56 PM	Bubbler valve opened
3/8/2011	3:16:56 PM	Helium MFC set to  500.000000
3/8/2011	3:16:56 PM	H2 MFC set to  0.000000
3/8/2011	3:16:56 PM	BCl3 MFC set to  0.000000
3/8/2011	3:16:56 PM	PHl3 MFC set to  0.000000
3/8/2011	3:16:56 PM	SiCl4 MFC set to  0.000000
3/8/2011	3:16:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	3:16:56 PM	Tube furnace set to 0
3/8/2011	3:36:56 PM	Helium valve closed
3/8/2011	3:36:56 PM	H2 valve closed
3/8/2011	3:36:56 PM	BCl3 valve closed
3/8/2011	3:36:56 PM	PH3 valve closed
3/8/2011	3:36:56 PM	SiCl4 pre valve closed
3/8/2011	3:36:56 PM	SiCl4 post valve closed
3/8/2011	3:36:56 PM	Main Vac valve closed
3/8/2011	3:36:56 PM	Bypass valve closed
3/8/2011	3:36:56 PM	Bubbler valve closed
3/8/2011	3:36:56 PM	Helium MFC set to  0.000000
3/8/2011	3:36:56 PM	H2 MFC set to  0.000000
3/8/2011	3:36:56 PM	BCl3 MFC set to  0.000000
3/8/2011	3:36:56 PM	PHl3 MFC set to  0.000000
3/8/2011	3:36:56 PM	SiCl4 MFC set to  0.000000
3/8/2011	3:36:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	3:36:57 PM	Tube furnace set to 0
3/8/2011	3:36:57 PM	Run finished at 3:36 PM
3/8/2011	3:41:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	3:41:08 PM	Recipe started at 3:41 PM
3/8/2011	3:41:08 PM	H2 valve closed
3/8/2011	3:41:08 PM	BCl3 valve closed
3/8/2011	3:41:08 PM	PH3 valve closed
3/8/2011	3:41:08 PM	SiCl4 pre valve closed
3/8/2011	3:41:08 PM	SiCl4 post valve closed
3/8/2011	3:41:08 PM	Main Vac valve closed
3/8/2011	3:41:08 PM	Bypass valve closed
3/8/2011	3:41:08 PM	Bubbler valve closed
3/8/2011	3:41:08 PM	Helium valve opened
3/8/2011	3:41:08 PM	Helium MFC set to  500.000000
3/8/2011	3:41:08 PM	H2 MFC set to  0.000000
3/8/2011	3:41:08 PM	BCl3 MFC set to  0.000000
3/8/2011	3:41:08 PM	PHl3 MFC set to  0.000000
3/8/2011	3:41:08 PM	SiCl4 MFC set to  0.000000
3/8/2011	3:41:08 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	3:41:08 PM	Tube furnace set to 0
3/8/2011	3:41:10 PM	Helium valve closed
3/8/2011	3:41:10 PM	H2 valve closed
3/8/2011	3:41:10 PM	BCl3 valve closed
3/8/2011	3:41:10 PM	PH3 valve closed
3/8/2011	3:41:10 PM	SiCl4 pre valve closed
3/8/2011	3:41:10 PM	SiCl4 post valve closed
3/8/2011	3:41:10 PM	Main Vac valve closed
3/8/2011	3:41:10 PM	Bypass valve closed
3/8/2011	3:41:10 PM	Bubbler valve closed
3/8/2011	3:41:10 PM	Helium MFC set to  0.000000
3/8/2011	3:41:10 PM	H2 MFC set to  0.000000
3/8/2011	3:41:10 PM	BCl3 MFC set to  0.000000
3/8/2011	3:41:10 PM	PHl3 MFC set to  0.000000
3/8/2011	3:41:10 PM	SiCl4 MFC set to  0.000000
3/8/2011	3:41:10 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	3:41:10 PM	Tube furnace set to 0
3/8/2011	3:41:10 PM	Run finished at 3:41 PM
3/8/2011	3:41:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	3:46:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	3:46:30 PM	Recipe started at 3:46 PM
3/8/2011	3:46:30 PM	Helium valve closed
3/8/2011	3:46:30 PM	H2 valve closed
3/8/2011	3:46:30 PM	BCl3 valve closed
3/8/2011	3:46:30 PM	PH3 valve closed
3/8/2011	3:46:30 PM	SiCl4 pre valve closed
3/8/2011	3:46:30 PM	SiCl4 post valve closed
3/8/2011	3:46:30 PM	Main Vac valve closed
3/8/2011	3:46:30 PM	Bubbler valve closed
3/8/2011	3:46:30 PM	Bypass valve opened
3/8/2011	3:46:30 PM	Helium MFC set to  0.000000
3/8/2011	3:46:30 PM	H2 MFC set to  0.000000
3/8/2011	3:46:30 PM	BCl3 MFC set to  0.000000
3/8/2011	3:46:30 PM	PHl3 MFC set to  0.000000
3/8/2011	3:46:30 PM	SiCl4 MFC set to  0.000000
3/8/2011	3:46:30 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	3:46:30 PM	Tube furnace set to 0
3/8/2011	3:47:02 PM	Helium valve closed
3/8/2011	3:47:02 PM	H2 valve closed
3/8/2011	3:47:02 PM	BCl3 valve closed
3/8/2011	3:47:02 PM	PH3 valve closed
3/8/2011	3:47:02 PM	SiCl4 pre valve closed
3/8/2011	3:47:02 PM	SiCl4 post valve closed
3/8/2011	3:47:02 PM	Bubbler valve closed
3/8/2011	3:47:02 PM	Main Vac valve opened
3/8/2011	3:47:02 PM	Bypass valve opened
3/8/2011	3:47:02 PM	Helium MFC set to  0.000000
3/8/2011	3:47:02 PM	H2 MFC set to  0.000000
3/8/2011	3:47:02 PM	BCl3 MFC set to  0.000000
3/8/2011	3:47:02 PM	PHl3 MFC set to  0.000000
3/8/2011	3:47:02 PM	SiCl4 MFC set to  0.000000
3/8/2011	3:47:02 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	3:47:02 PM	Tube furnace set to 0
3/8/2011	3:47:02 PM	Run finished at 3:47 PM
3/8/2011	3:47:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	5:07:34 PM	Recipe started at 5:07 PM
3/8/2011	5:07:34 PM	Helium valve closed
3/8/2011	5:07:34 PM	BCl3 valve closed
3/8/2011	5:07:34 PM	PH3 valve closed
3/8/2011	5:07:34 PM	SiCl4 pre valve closed
3/8/2011	5:07:34 PM	SiCl4 post valve closed
3/8/2011	5:07:34 PM	Main Vac valve closed
3/8/2011	5:07:34 PM	Bypass valve closed
3/8/2011	5:07:34 PM	Bubbler valve closed
3/8/2011	5:07:34 PM	H2 valve opened
3/8/2011	5:07:34 PM	Helium MFC set to  0.000000
3/8/2011	5:07:34 PM	H2 MFC set to  500.000000
3/8/2011	5:07:34 PM	BCl3 MFC set to  0.000000
3/8/2011	5:07:34 PM	PHl3 MFC set to  0.000000
3/8/2011	5:07:34 PM	SiCl4 MFC set to  0.000000
3/8/2011	5:07:34 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	5:07:35 PM	Tube furnace set to 0
3/8/2011	5:08:57 PM	Helium valve closed
3/8/2011	5:08:57 PM	BCl3 valve closed
3/8/2011	5:08:57 PM	PH3 valve closed
3/8/2011	5:08:57 PM	SiCl4 pre valve closed
3/8/2011	5:08:57 PM	SiCl4 post valve closed
3/8/2011	5:08:57 PM	Main Vac valve closed
3/8/2011	5:08:57 PM	Bypass valve closed
3/8/2011	5:08:57 PM	H2 valve opened
3/8/2011	5:08:57 PM	Bubbler valve opened
3/8/2011	5:08:57 PM	Helium MFC set to  0.000000
3/8/2011	5:08:57 PM	H2 MFC set to  500.000000
3/8/2011	5:08:57 PM	BCl3 MFC set to  0.000000
3/8/2011	5:08:57 PM	PHl3 MFC set to  0.000000
3/8/2011	5:08:57 PM	SiCl4 MFC set to  0.000000
3/8/2011	5:08:57 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	5:08:57 PM	Tube furnace set to 1000
3/8/2011	5:28:57 PM	Helium valve closed
3/8/2011	5:28:57 PM	PH3 valve closed
3/8/2011	5:28:57 PM	Main Vac valve closed
3/8/2011	5:28:57 PM	Bypass valve closed
3/8/2011	5:28:57 PM	H2 valve opened
3/8/2011	5:28:57 PM	BCl3 valve opened
3/8/2011	5:28:57 PM	SiCl4 pre valve opened
3/8/2011	5:28:57 PM	SiCl4 post valve opened
3/8/2011	5:28:57 PM	Bubbler valve opened
3/8/2011	5:28:57 PM	Helium MFC set to  0.000000
3/8/2011	5:28:57 PM	H2 MFC set to  500.000000
3/8/2011	5:28:57 PM	BCl3 MFC set to  3.000000
3/8/2011	5:28:57 PM	PHl3 MFC set to  0.000000
3/8/2011	5:28:57 PM	SiCl4 MFC set to  50.000000
3/8/2011	5:28:57 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	5:28:58 PM	Tube furnace set to 1000
3/8/2011	5:43:58 PM	H2 valve closed
3/8/2011	5:43:58 PM	BCl3 valve closed
3/8/2011	5:43:58 PM	PH3 valve closed
3/8/2011	5:43:58 PM	SiCl4 pre valve closed
3/8/2011	5:43:58 PM	SiCl4 post valve closed
3/8/2011	5:43:58 PM	Main Vac valve closed
3/8/2011	5:43:58 PM	Bypass valve closed
3/8/2011	5:43:58 PM	Helium valve opened
3/8/2011	5:43:58 PM	Bubbler valve opened
3/8/2011	5:43:58 PM	Helium MFC set to  500.000000
3/8/2011	5:43:58 PM	H2 MFC set to  0.000000
3/8/2011	5:43:58 PM	BCl3 MFC set to  0.000000
3/8/2011	5:43:58 PM	PHl3 MFC set to  0.000000
3/8/2011	5:43:58 PM	SiCl4 MFC set to  0.000000
3/8/2011	5:43:58 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	5:43:58 PM	Tube furnace set to 0
3/8/2011	6:01:13 PM	Helium valve closed
3/8/2011	6:01:13 PM	H2 valve closed
3/8/2011	6:01:13 PM	BCl3 valve closed
3/8/2011	6:01:13 PM	PH3 valve closed
3/8/2011	6:01:13 PM	SiCl4 pre valve closed
3/8/2011	6:01:13 PM	SiCl4 post valve closed
3/8/2011	6:01:13 PM	Main Vac valve closed
3/8/2011	6:01:13 PM	Bypass valve closed
3/8/2011	6:01:13 PM	Bubbler valve closed
3/8/2011	6:01:13 PM	Helium MFC set to  0.000000
3/8/2011	6:01:13 PM	H2 MFC set to  0.000000
3/8/2011	6:01:13 PM	BCl3 MFC set to  0.000000
3/8/2011	6:01:13 PM	PHl3 MFC set to  0.000000
3/8/2011	6:01:13 PM	SiCl4 MFC set to  0.000000
3/8/2011	6:01:13 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	6:01:13 PM	Tube furnace set to 0
3/8/2011	6:01:13 PM	Run finished at 6:01 PM
3/8/2011	6:03:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	6:03:30 PM	Recipe started at 6:03 PM
3/8/2011	6:03:30 PM	Helium valve closed
3/8/2011	6:03:30 PM	H2 valve closed
3/8/2011	6:03:30 PM	BCl3 valve closed
3/8/2011	6:03:30 PM	PH3 valve closed
3/8/2011	6:03:30 PM	SiCl4 pre valve closed
3/8/2011	6:03:30 PM	SiCl4 post valve closed
3/8/2011	6:03:30 PM	Main Vac valve closed
3/8/2011	6:03:30 PM	Bubbler valve closed
3/8/2011	6:03:30 PM	Bypass valve opened
3/8/2011	6:03:30 PM	Helium MFC set to  0.000000
3/8/2011	6:03:30 PM	H2 MFC set to  0.000000
3/8/2011	6:03:30 PM	BCl3 MFC set to  0.000000
3/8/2011	6:03:30 PM	PHl3 MFC set to  0.000000
3/8/2011	6:03:30 PM	SiCl4 MFC set to  0.000000
3/8/2011	6:03:30 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	6:03:30 PM	Tube furnace set to 0
3/8/2011	6:04:03 PM	Helium valve closed
3/8/2011	6:04:03 PM	H2 valve closed
3/8/2011	6:04:03 PM	BCl3 valve closed
3/8/2011	6:04:03 PM	PH3 valve closed
3/8/2011	6:04:03 PM	SiCl4 pre valve closed
3/8/2011	6:04:03 PM	SiCl4 post valve closed
3/8/2011	6:04:03 PM	Bubbler valve closed
3/8/2011	6:04:03 PM	Main Vac valve opened
3/8/2011	6:04:03 PM	Bypass valve opened
3/8/2011	6:04:03 PM	Helium MFC set to  0.000000
3/8/2011	6:04:03 PM	H2 MFC set to  0.000000
3/8/2011	6:04:03 PM	BCl3 MFC set to  0.000000
3/8/2011	6:04:03 PM	PHl3 MFC set to  0.000000
3/8/2011	6:04:03 PM	SiCl4 MFC set to  0.000000
3/8/2011	6:04:03 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	6:04:03 PM	Tube furnace set to 0
3/8/2011	6:04:03 PM	Run finished at 6:04 PM
3/8/2011	6:04:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	10:35:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	10:35:32 PM	Recipe started at 10:35 PM
3/8/2011	10:35:32 PM	H2 valve closed
3/8/2011	10:35:32 PM	BCl3 valve closed
3/8/2011	10:35:32 PM	PH3 valve closed
3/8/2011	10:35:32 PM	SiCl4 pre valve closed
3/8/2011	10:35:32 PM	SiCl4 post valve closed
3/8/2011	10:35:32 PM	Main Vac valve closed
3/8/2011	10:35:32 PM	Bypass valve closed
3/8/2011	10:35:32 PM	Bubbler valve closed
3/8/2011	10:35:32 PM	Helium valve opened
3/8/2011	10:35:32 PM	Helium MFC set to  500.000000
3/8/2011	10:35:32 PM	H2 MFC set to  0.000000
3/8/2011	10:35:32 PM	BCl3 MFC set to  0.000000
3/8/2011	10:35:32 PM	PHl3 MFC set to  0.000000
3/8/2011	10:35:32 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:35:32 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:35:32 PM	Tube furnace set to 0
3/8/2011	10:36:52 PM	Helium valve closed
3/8/2011	10:36:52 PM	H2 valve closed
3/8/2011	10:36:52 PM	BCl3 valve closed
3/8/2011	10:36:52 PM	PH3 valve closed
3/8/2011	10:36:52 PM	SiCl4 pre valve closed
3/8/2011	10:36:52 PM	SiCl4 post valve closed
3/8/2011	10:36:52 PM	Main Vac valve closed
3/8/2011	10:36:52 PM	Bypass valve closed
3/8/2011	10:36:52 PM	Bubbler valve closed
3/8/2011	10:36:52 PM	Helium MFC set to  0.000000
3/8/2011	10:36:52 PM	H2 MFC set to  0.000000
3/8/2011	10:36:52 PM	BCl3 MFC set to  0.000000
3/8/2011	10:36:52 PM	PHl3 MFC set to  0.000000
3/8/2011	10:36:52 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:36:52 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:36:52 PM	Tube furnace set to 0
3/8/2011	10:36:52 PM	Run finished at 10:36 PM
3/8/2011	10:36:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2011	10:37:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	10:37:55 PM	Recipe started at 10:37 PM
3/8/2011	10:37:55 PM	Helium valve closed
3/8/2011	10:37:55 PM	H2 valve closed
3/8/2011	10:37:55 PM	BCl3 valve closed
3/8/2011	10:37:55 PM	PH3 valve closed
3/8/2011	10:37:55 PM	SiCl4 pre valve closed
3/8/2011	10:37:55 PM	SiCl4 post valve closed
3/8/2011	10:37:55 PM	Main Vac valve closed
3/8/2011	10:37:55 PM	Bubbler valve closed
3/8/2011	10:37:55 PM	Bypass valve opened
3/8/2011	10:37:55 PM	Helium MFC set to  0.000000
3/8/2011	10:37:55 PM	H2 MFC set to  0.000000
3/8/2011	10:37:55 PM	BCl3 MFC set to  0.000000
3/8/2011	10:37:55 PM	PHl3 MFC set to  0.000000
3/8/2011	10:37:55 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:37:55 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:37:55 PM	Tube furnace set to 0
3/8/2011	10:38:18 PM	Helium valve closed
3/8/2011	10:38:18 PM	H2 valve closed
3/8/2011	10:38:18 PM	BCl3 valve closed
3/8/2011	10:38:18 PM	PH3 valve closed
3/8/2011	10:38:18 PM	SiCl4 pre valve closed
3/8/2011	10:38:18 PM	SiCl4 post valve closed
3/8/2011	10:38:18 PM	Bubbler valve closed
3/8/2011	10:38:18 PM	Main Vac valve opened
3/8/2011	10:38:18 PM	Bypass valve opened
3/8/2011	10:38:18 PM	Helium MFC set to  0.000000
3/8/2011	10:38:18 PM	H2 MFC set to  0.000000
3/8/2011	10:38:18 PM	BCl3 MFC set to  0.000000
3/8/2011	10:38:18 PM	PHl3 MFC set to  0.000000
3/8/2011	10:38:18 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:38:18 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:38:18 PM	Tube furnace set to 0
3/8/2011	10:38:18 PM	Run finished at 10:38 PM
3/8/2011	10:38:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	10:39:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/8/2011	10:39:24 PM	Recipe started at 10:39 PM
3/8/2011	10:39:24 PM	Helium valve closed
3/8/2011	10:39:24 PM	H2 valve closed
3/8/2011	10:39:24 PM	BCl3 valve closed
3/8/2011	10:39:24 PM	PH3 valve closed
3/8/2011	10:39:24 PM	SiCl4 pre valve closed
3/8/2011	10:39:24 PM	SiCl4 post valve closed
3/8/2011	10:39:24 PM	Main Vac valve closed
3/8/2011	10:39:24 PM	Bubbler valve closed
3/8/2011	10:39:24 PM	Bypass valve opened
3/8/2011	10:39:24 PM	Helium MFC set to  0.000000
3/8/2011	10:39:24 PM	H2 MFC set to  0.000000
3/8/2011	10:39:24 PM	BCl3 MFC set to  0.000000
3/8/2011	10:39:24 PM	PHl3 MFC set to  0.000000
3/8/2011	10:39:24 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:39:24 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:39:24 PM	Tube furnace set to 0
3/8/2011	10:39:25 PM	Helium valve closed
3/8/2011	10:39:25 PM	H2 valve closed
3/8/2011	10:39:25 PM	BCl3 valve closed
3/8/2011	10:39:25 PM	PH3 valve closed
3/8/2011	10:39:25 PM	SiCl4 pre valve closed
3/8/2011	10:39:25 PM	SiCl4 post valve closed
3/8/2011	10:39:25 PM	Bubbler valve closed
3/8/2011	10:39:25 PM	Main Vac valve opened
3/8/2011	10:39:25 PM	Bypass valve opened
3/8/2011	10:39:25 PM	Helium MFC set to  0.000000
3/8/2011	10:39:25 PM	H2 MFC set to  0.000000
3/8/2011	10:39:25 PM	BCl3 MFC set to  0.000000
3/8/2011	10:39:25 PM	PHl3 MFC set to  0.000000
3/8/2011	10:39:25 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:39:25 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:39:25 PM	Tube furnace set to 0
3/8/2011	10:40:25 PM	H2 valve closed
3/8/2011	10:40:25 PM	BCl3 valve closed
3/8/2011	10:40:25 PM	PH3 valve closed
3/8/2011	10:40:25 PM	SiCl4 pre valve closed
3/8/2011	10:40:25 PM	SiCl4 post valve closed
3/8/2011	10:40:25 PM	Bubbler valve closed
3/8/2011	10:40:25 PM	Helium valve opened
3/8/2011	10:40:25 PM	Main Vac valve opened
3/8/2011	10:40:25 PM	Bypass valve opened
3/8/2011	10:40:25 PM	Helium MFC set to  100.000000
3/8/2011	10:40:25 PM	H2 MFC set to  0.000000
3/8/2011	10:40:25 PM	BCl3 MFC set to  0.000000
3/8/2011	10:40:25 PM	PHl3 MFC set to  0.000000
3/8/2011	10:40:25 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:40:25 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:40:25 PM	Tube furnace set to 0
3/8/2011	10:41:25 PM	Helium valve closed
3/8/2011	10:41:25 PM	H2 valve closed
3/8/2011	10:41:25 PM	BCl3 valve closed
3/8/2011	10:41:25 PM	PH3 valve closed
3/8/2011	10:41:25 PM	SiCl4 pre valve closed
3/8/2011	10:41:25 PM	SiCl4 post valve closed
3/8/2011	10:41:25 PM	Bubbler valve closed
3/8/2011	10:41:25 PM	Main Vac valve opened
3/8/2011	10:41:25 PM	Bypass valve opened
3/8/2011	10:41:25 PM	Helium MFC set to  0.000000
3/8/2011	10:41:25 PM	H2 MFC set to  0.000000
3/8/2011	10:41:25 PM	BCl3 MFC set to  0.000000
3/8/2011	10:41:25 PM	PHl3 MFC set to  0.000000
3/8/2011	10:41:25 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:41:25 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:41:25 PM	Tube furnace set to 0
3/8/2011	10:42:05 PM	Run aborted at 10:42 PM
3/8/2011	10:42:05 PM	Helium valve closed
3/8/2011	10:42:05 PM	H2 valve closed
3/8/2011	10:42:05 PM	BCl3 valve closed
3/8/2011	10:42:05 PM	PH3 valve closed
3/8/2011	10:42:05 PM	SiCl4 pre valve closed
3/8/2011	10:42:05 PM	SiCl4 post valve closed
3/8/2011	10:42:05 PM	Bypass valve closed
3/8/2011	10:42:05 PM	Main Vac valve closed
3/8/2011	10:42:05 PM	Bubbler valve closed
3/8/2011	10:42:05 PM	Helium MFC set to  0.000000
3/8/2011	10:42:05 PM	H2 MFC set to  0.000000
3/8/2011	10:42:05 PM	BCl3 MFC set to  0.000000
3/8/2011	10:42:05 PM	PHl3 MFC set to  0.000000
3/8/2011	10:42:05 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:42:06 PM	Tube furnace set to 0
3/8/2011	10:42:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/8/2011	10:42:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	10:42:20 PM	Recipe started at 10:42 PM
3/8/2011	10:42:20 PM	Helium valve closed
3/8/2011	10:42:20 PM	H2 valve closed
3/8/2011	10:42:20 PM	BCl3 valve closed
3/8/2011	10:42:20 PM	PH3 valve closed
3/8/2011	10:42:20 PM	SiCl4 pre valve closed
3/8/2011	10:42:20 PM	SiCl4 post valve closed
3/8/2011	10:42:20 PM	Main Vac valve closed
3/8/2011	10:42:20 PM	Bubbler valve closed
3/8/2011	10:42:20 PM	Bypass valve opened
3/8/2011	10:42:20 PM	Helium MFC set to  0.000000
3/8/2011	10:42:20 PM	H2 MFC set to  0.000000
3/8/2011	10:42:20 PM	BCl3 MFC set to  0.000000
3/8/2011	10:42:20 PM	PHl3 MFC set to  0.000000
3/8/2011	10:42:20 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:42:20 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:42:20 PM	Tube furnace set to 0
3/8/2011	10:42:20 PM	Helium valve closed
3/8/2011	10:42:20 PM	H2 valve closed
3/8/2011	10:42:20 PM	BCl3 valve closed
3/8/2011	10:42:20 PM	PH3 valve closed
3/8/2011	10:42:20 PM	SiCl4 pre valve closed
3/8/2011	10:42:20 PM	SiCl4 post valve closed
3/8/2011	10:42:20 PM	Bubbler valve closed
3/8/2011	10:42:20 PM	Main Vac valve opened
3/8/2011	10:42:20 PM	Bypass valve opened
3/8/2011	10:42:20 PM	Helium MFC set to  0.000000
3/8/2011	10:42:20 PM	H2 MFC set to  0.000000
3/8/2011	10:42:20 PM	BCl3 MFC set to  0.000000
3/8/2011	10:42:20 PM	PHl3 MFC set to  0.000000
3/8/2011	10:42:20 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:42:20 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:42:21 PM	Tube furnace set to 0
3/8/2011	10:42:21 PM	Run finished at 10:42 PM
3/8/2011	10:42:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2011	10:42:42 PM	Helium MFC set to  50.000000
3/8/2011	10:42:43 PM	Helium valve opened
3/8/2011	10:42:55 PM	Helium MFC set to  0.000000
3/8/2011	10:42:56 PM	Helium valve closed
3/8/2011	10:44:32 PM	Recipe started at 10:44 PM
3/8/2011	10:44:32 PM	Helium valve closed
3/8/2011	10:44:32 PM	BCl3 valve closed
3/8/2011	10:44:32 PM	PH3 valve closed
3/8/2011	10:44:32 PM	SiCl4 pre valve closed
3/8/2011	10:44:32 PM	SiCl4 post valve closed
3/8/2011	10:44:32 PM	Main Vac valve closed
3/8/2011	10:44:32 PM	Bypass valve closed
3/8/2011	10:44:32 PM	Bubbler valve closed
3/8/2011	10:44:32 PM	H2 valve opened
3/8/2011	10:44:32 PM	Helium MFC set to  0.000000
3/8/2011	10:44:32 PM	H2 MFC set to  500.000000
3/8/2011	10:44:32 PM	BCl3 MFC set to  0.000000
3/8/2011	10:44:32 PM	PHl3 MFC set to  0.000000
3/8/2011	10:44:32 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:44:32 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:44:32 PM	Tube furnace set to 0
3/8/2011	10:45:55 PM	Helium valve closed
3/8/2011	10:45:55 PM	BCl3 valve closed
3/8/2011	10:45:55 PM	PH3 valve closed
3/8/2011	10:45:55 PM	SiCl4 pre valve closed
3/8/2011	10:45:55 PM	SiCl4 post valve closed
3/8/2011	10:45:55 PM	Main Vac valve closed
3/8/2011	10:45:55 PM	Bypass valve closed
3/8/2011	10:45:55 PM	H2 valve opened
3/8/2011	10:45:55 PM	Bubbler valve opened
3/8/2011	10:45:55 PM	Helium MFC set to  0.000000
3/8/2011	10:45:55 PM	H2 MFC set to  500.000000
3/8/2011	10:45:55 PM	BCl3 MFC set to  0.000000
3/8/2011	10:45:55 PM	PHl3 MFC set to  0.000000
3/8/2011	10:45:55 PM	SiCl4 MFC set to  0.000000
3/8/2011	10:45:55 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	10:45:55 PM	Tube furnace set to 1000
3/8/2011	11:05:55 PM	Helium valve closed
3/8/2011	11:05:55 PM	PH3 valve closed
3/8/2011	11:05:55 PM	Main Vac valve closed
3/8/2011	11:05:55 PM	Bypass valve closed
3/8/2011	11:05:55 PM	H2 valve opened
3/8/2011	11:05:55 PM	BCl3 valve opened
3/8/2011	11:05:55 PM	SiCl4 pre valve opened
3/8/2011	11:05:55 PM	SiCl4 post valve opened
3/8/2011	11:05:55 PM	Bubbler valve opened
3/8/2011	11:05:55 PM	Helium MFC set to  0.000000
3/8/2011	11:05:55 PM	H2 MFC set to  500.000000
3/8/2011	11:05:55 PM	BCl3 MFC set to  3.000000
3/8/2011	11:05:55 PM	PHl3 MFC set to  0.000000
3/8/2011	11:05:55 PM	SiCl4 MFC set to  50.000000
3/8/2011	11:05:55 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:05:55 PM	Tube furnace set to 1000
3/8/2011	11:20:55 PM	H2 valve closed
3/8/2011	11:20:55 PM	BCl3 valve closed
3/8/2011	11:20:55 PM	PH3 valve closed
3/8/2011	11:20:55 PM	SiCl4 pre valve closed
3/8/2011	11:20:55 PM	SiCl4 post valve closed
3/8/2011	11:20:55 PM	Main Vac valve closed
3/8/2011	11:20:55 PM	Bypass valve closed
3/8/2011	11:20:55 PM	Helium valve opened
3/8/2011	11:20:55 PM	Bubbler valve opened
3/8/2011	11:20:55 PM	Helium MFC set to  500.000000
3/8/2011	11:20:55 PM	H2 MFC set to  0.000000
3/8/2011	11:20:55 PM	BCl3 MFC set to  0.000000
3/8/2011	11:20:55 PM	PHl3 MFC set to  0.000000
3/8/2011	11:20:55 PM	SiCl4 MFC set to  0.000000
3/8/2011	11:20:55 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:20:55 PM	Tube furnace set to 0
3/8/2011	11:40:55 PM	Helium valve closed
3/8/2011	11:40:55 PM	H2 valve closed
3/8/2011	11:40:55 PM	BCl3 valve closed
3/8/2011	11:40:55 PM	PH3 valve closed
3/8/2011	11:40:55 PM	SiCl4 pre valve closed
3/8/2011	11:40:55 PM	SiCl4 post valve closed
3/8/2011	11:40:55 PM	Main Vac valve closed
3/8/2011	11:40:55 PM	Bypass valve closed
3/8/2011	11:40:55 PM	Bubbler valve closed
3/8/2011	11:40:55 PM	Helium MFC set to  0.000000
3/8/2011	11:40:55 PM	H2 MFC set to  0.000000
3/8/2011	11:40:55 PM	BCl3 MFC set to  0.000000
3/8/2011	11:40:55 PM	PHl3 MFC set to  0.000000
3/8/2011	11:40:55 PM	SiCl4 MFC set to  0.000000
3/8/2011	11:40:55 PM	Bypass solenoid MFC set to  0.000000
3/8/2011	11:40:55 PM	Tube furnace set to 0
3/8/2011	11:40:56 PM	Run finished at 11:40 PM
